Influence of powerful laser radiation on formation of pores in Si by electrochemical etching

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22.12.2009

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Medvid', A., Onufrijev, P., Fedorenko, L., Yusupov, M., & Dauksta, E. (2009). Influence of powerful laser radiation on formation of pores in Si by electrochemical etching. Journal of Automation, Mobile Robotics and Intelligent Systems, 3(4), 166-168. https://www.jamris.org/index.php/JAMRIS/article/view/78