Effect of substrate temperature on the crystal properties of LiMn204 films prepared by RF magnetron sputtering

Authors

Downloads

Published

22.12.2009

Issue

Section

Articles

How to Cite

Isai, M., Nkamura, K., Hosokawa, T., Izumichi, T., & Sekikawa, S. (2009). Effect of substrate temperature on the crystal properties of LiMn204 films prepared by RF magnetron sputtering. Journal of Automation, Mobile Robotics and Intelligent Systems, 3(4), 65-68. https://www.jamris.org/index.php/JAMRIS/article/view/48