Effect of substrate temperature on the crystal properties of LiMn204 films prepared by RF magnetron sputtering

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Published
22.01.2013
Issue
ISSUE 04/2009
Section
Articles

How to Cite

Isai, M., Nkamura, K., Hosokawa, T., Izumichi, T., & Sekikawa, S. (2013). Effect of substrate temperature on the crystal properties of LiMn204 films prepared by RF magnetron sputtering. Journal of Automation, Mobile Robotics and Intelligent Systems, 3(4), 65-68. https://www.jamris.org/index.php/JAMRIS/article/view/48
How to Cite
Isai, M., Nkamura, K., Hosokawa, T., Izumichi, T., & Sekikawa, S. (2013). Effect of substrate temperature on the crystal properties of LiMn204 films prepared by RF magnetron sputtering. Journal of Automation, Mobile Robotics and Intelligent Systems, 3(4), 65-68. https://www.jamris.org/index.php/JAMRIS/article/view/48

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